2262 views

Lec 28 - AST 210/EE 213 EUV lithography

AST 210/EE 213 EUV lithography Applied Science & Technology 210 / Electrical Engineering 213: Soft X-Rays and Extreme Ultraviolet Radiation Lecture 28: EUV lithography http://www.coe.berkeley.edu/AST/sxreuv/ Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwood's research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography. [courses] [ee213] [fall2005]

Video is embedded from external source so embedding is not available.

Video is embedded from external source so download is not available.

No content is added to this lecture.

Go to course:

This video is a part of a lecture series from of berkeley