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Lec 8 - AST 210/EE 213 Multilayer applications

AST 210/EE 213 Multilayer applications Applied Science & Technology 210 / Electrical Engineering 213: Soft X-Rays and Extreme Ultraviolet Radiation Lecture 8: Multilayer applications http://www.coe.berkeley.edu/AST/sxreuv/ Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwood's research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography. [courses] [ee213] [fall2005]

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