Course: Electrical Engineering C245, 001 - Fall 2010 Dnatube

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Lec 1- Electrical Engineering C245 Admin ...

Lec 1- Electrical Engineering C245 Administrative Info. Introduction to MEMS Design
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Lec 2- Benefits of Scaling

Lec 2- Benefits of Scaling. Introduction to MEMS Design
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Lec 3- Benefits of Scaling

Lec 3- Benefits of Scaling.Introduction to MEMS Design
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Lec 4- Benefits of Scaling III

Lec 4- Benefits of Scaling III. Introduction to MEMS Design
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Lec 5- Process Modules I: Oxidation and ...

Lec 5- Process Modules I: Oxidation and Film Deposition. Introduction to MEMS Design
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Lec 6- Process Modules II

Lec 6- Process Modules II. Introduction to MEMS Design
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Lec 7- Process Modiles III: Lithography, ...

Lec 7- Process Modiles III: Lithography, Etching, and Doping. Introduction to MEMS Design
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Lec 8- urface Micromachining: Lithograph ...

Lec 8- urface Micromachining: Lithography, Etching and Doping. Introduction to MEMS Design
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Lec 9- Surface Micromachining II

Lec 9- Surface Micromachining II. Introduction to MEMS Design
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Lec 10- Surface Micromachining and Surfa ...

Lec 10- Surface Micromachining and Surface Micromachining III. Introduction to MEMS Design
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Lec 11- Mechanics of Mater

Lec 11- Mechanics of Mater. Introduction to MEMS Design
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Lec 12- Mechanics of Mater

Lec 12- Mechanics of Mater. Introduction to MEMS Design
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Lec 13- Energy Methods I

Lec 13- Energy Methods I. Introduction to MEMS Design
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Lec 14- Energy Methods II:

Lec 14- Energy Methods II:. Introduction to MEMS Design
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Lec 15- Equivalent Circuit

Lec 15- Equivalent Circuit. Introduction to MEMS Design
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Lec 16- Equivalent Circuit

Lec 16- Equivalent Circuit. Introduction to MEMS Design
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Lec 17- Lossless Transduce

Lec 17- Lossless Transduce. Introduction to MEMS Design
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Lec 18- Lossless Transduce

Lec 18- Lossless Transduce. Introduction to MEMS Design
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Lec 19- Equivalent Circuit

Lec 19- Equivalent Circuit. Introduction to MEMS Design
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Lec 20- Equivalent Circuit

Lec 20- Equivalent Circuit. Introduction to MEMS Design
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Lec 21- Sensing Circuits I

Lec 21- Sensing Circuits I. Introduction to MEMS Design
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Lec 22- Sensing Circuits I

Lec 22- Sensing Circuits I. Introduction to MEMS Design
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Lec 23- Sensing Circuits I

Lec 23- Sensing Circuits I. Introduction to MEMS Design
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Lec 24- Sensor Resolution

Lec 24- Sensor Resolution. Introduction to MEMS Design
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Lec 25- Sensor Resolution

Lec 25- Sensor Resolution. Introduction to MEMS Design
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Lec 26- MEMS-Transistor In

Lec 26- MEMS-Transistor In. Introduction to MEMS Design

Electrical Engineering C245, 001 - Fall 2010


Source of these courses is UCBerkeley 
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS
UCBerkeley  Website: http://www.dnatube.com/school/berkeley

COURSE NAME: Electrical Engineering C245, 001 - Fall 2010

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