Lec 8- urface Micromachining: Lithography, Etching and Doping
Lec 8- urface Micromachining: Lithography, Etching and Doping. Introduction to MEMS Design
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Channels: Physics (General)
Tags: uc berkeley ucberkeley webcast.berkeley cal Fall 2010
Uploaded by: ucbelengc245001 ( Send Message ) on 02-09-2012.
Duration: 82m 16s
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This video is a part of a lecture series from of UCBerkeley
Lecture list for this course
Lec 1- Electrical Engineering C245 Administrative Info
Lec 4- Benefits of Scaling III
Lec 5- Process Modules I: Oxidation and Film Deposition
Lec 7- Process Modiles III: Lithography, Etching, and Doping
Lec 9- Surface Micromachining II
Lec 10- Surface Micromachining and Surface Micromachining III